Temperature-Controlled MEMS Reactors and Photonic Crystals for In-Situ Transmission Electron Microscopy
A.K. Erdamar (TU Delft - Electrical Engineering, Mathematics and Computer Science)
P.J. French – Promotor (TU Delft - Electrical Engineering, Mathematics and Computer Science)
U. Staufer – Promotor (TU Delft - Mechanical Engineering)
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Abstract
This thesis investigates the integration of Transmission Electron Microscopy (TEM), Microelectromechanical Systems (MEMS)-based heaters, and Photonic Crystals (PhCs) for advanced materials characterization at the nanoscale. TEM is paired with MEMS-based microheaters to enable in-situ temperature control during atomic-resolution imaging, facilitating the study of temperature-dependent material properties. The work focuses on the fabrication of MEMS-based microheaters and the development of thin electron-transparent membranes using backside electron-beam lithography, allowing precise control over the heating process and enabling new capabilities in TEM experiments. Additionally, MEMS-based nanoreactors are designed for high-pressure in-situ TEM studies, providing insights into gas-material interactions and catalytic processes under realistic environmental conditions.
The thermal tuning of PhC cavities using elastomeric infills is also explored, demonstrating the potential for temperature-responsive optical devices. Finally, the integration of cathodoluminescence (CL) spectroscopy with TEM for the study of nitrogen-vacancy (NV) centres in diamond photonic crystals is presented, with a focus on overcoming challenges in fibre-diamond coupling and optimizing experimental conditions for NV detection.
This work advances the field of materials science, offering innovative solutions for high-resolution imaging, photonic device development, and their applications.