Interrogating and manipulating at the nanometre scale : from scientific instrumentation to industrial applications
Conference Paper
(2013)
Author(s)
URS Staufer (TU Delft - Micro and Nano Engineering)
T Akiyama (External organisation)
S. Gautsch (External organisation)
D Parrat (External organisation)
NF de Rooij (External organisation)
R Imer (External organisation)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/Transducers.2013.6627062
To reference this document use:
https://resolver.tudelft.nl/uuid:1b07d89d-2c4d-4bb1-ae50-fcdfdafa0916
More Info
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Publication Year
2013
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
1488-1492
ISBN (print)
978-1-4673-5981-8
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