Extrapolation of optimal lifted system ILC solution, with application to a waferstage

Conference Paper (2002)

Author(s)

BG Dijkstra (TU Delft - DISC)

O.H. Bosgra (TU Delft - DISC)

Research Group

DISC

Conf.proc. > 3 pag

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Publication Year

2002

Research Group

DISC

Pages (from-to)

2595-2600

ISBN (print)

0-7803-7298-0

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