Reducing residual vibrations through iterative learning control with application to a wafer stage

Iterative learning control: with applications to a wafer stage

Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

Time-frequency analysis of lifted and standard iterative learning control applied to the short stroke of a wafer stage test rig

Extrapolation of optimal lifted system ILC solution, with application to a waferstage

Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage

Input design for optimal discrete time point-to-point motion of an industrial XY-positioning table