Time-frequency analysis of lifted and standard iterative learning control applied to the short stroke of a wafer stage test rig

Report (2002)
Author(s)

I Rotariu (External organisation)

BG Dijkstra (TU Delft - DISC)

R Ellenbroek (External organisation)

M. Steinbuch (External organisation)

Research Group
DISC
More Info
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Publication Year
2002
Research Group
DISC
Bibliographical Note
Confidential@en

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