Reducing residual vibrations through iterative learning control with application to a wafer stage
Conference Paper
(2004)
Author(s)
CL van Oosten (External organisation)
OH Bosgra (TU Delft - DISC)
BG Dijkstra (TU Delft - DISC)
Research Group
DISC
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https://resolver.tudelft.nl/uuid:d56187f4-15de-4d7f-8be4-73082168c881
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Publication Year
2004
Research Group
DISC
Bibliographical Note
IEEE Catalog Number: 04CH37538C@en
Pages (from-to)
5150-5155
ISBN (print)
0-7803-8336-2
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