Positron beam analysis of ordered mesoporous silica low-k dielectric thin films
Report
(2001)
Author(s)
R Escobar Galindo (TU Delft - Old - Section Defects in Materials)
S. W.H. Eijt (TU Delft - Old - Section Defects in Materials)
A van Veen (TU Delft - Old - Section Defects in Materials)
H. Schut (TU Delft - Old - Section Defects in Materials)
CV Falub (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Bibliographical Note
IRI-DM-2001-005@en
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