Delay-based Input Shaping and Feedforward Design for Dual Closed-Loop Control Architectures Integrating Active Damping

Abstract

In nanopositioning systems, the control bandwidth is frequently limited due to the presence of lightly damped resonant dynamics. Active Damping Control is typically integrated with tracking control within an inner-loop configuration to mitigate dominant resonant dynamics and enable higher bandwidths. The paper discusses that, in such architectures, feedforward control based on plant dynamics inversion is insufficient to achieve the intended feedforward objectives. In response to this limitation, the study introduces a delay-based input shaping and feedforward framework combined with a dual closed-loop feedback control system that includes active damping. The feedforward filter, derived from partial inner closed-loop dynamics inversion, facilitates precise, delayed tracking of reference signals. This configuration implements a unity-gain shaping filter, effectively reducing tracking feedback errors caused by reference inputs. Furthermore, the study presents a simulated example employing a simplified dynamic model of an industrial nanopositioning system to demonstrate enhancements in closed-loop periodic tracking performance through the proposed feedforward and input-shaping methodology.