The sinusoidal input describing function (SIDF) is a powerful tool for control system analysis and design, with its reliability directly impacting the performance of the designed control systems. This study improves both the accuracy of SIDF analysis and the performance of closed-loop reset feedback systems through two main contributions. First, it introduces a method to identify frequency ranges where SIDF analysis becomes inaccurate. Second, these identified ranges correlate with dominated high-order harmonics that can degrade system performance. To address this, a shaped reset control strategy is proposed, incorporating a shaping filter that tunes reset actions to suppress these harmonics. A frequency-domain design procedure for the shaped reset control system is then demonstrated in a case study, where a proportional–integral–derivative (PID)-based shaping filter effectively reduces high-order harmonics and eliminates limit cycles issues under step inputs. Finally, simulations and experiments on a precision motion stage validate the shaped reset control, confirming improved SIDF analysis accuracy, enhanced steady-state performance over linear and reset controllers, and the elimination of limit cycles under step inputs.

Piezoelectric nanopositioning systems are often limited by lightly damped structural resonances and the gain--phase constraints of linear feedback, which restrict achievable bandwidth and tracking performance. This paper presents a dual-loop architecture that combines an inner-loop non-minimum-phase resonant controller (NRC) for active damping with an outer-loop tracking controller augmented by a constant-gain, lead-in-phase (CgLp) reset element to provide phase lead at the targeted crossover without increasing loop gain. We show that aggressively tuned CgLp designs with larger phase lead can introduce pronounced higher-order harmonics, degrading error sensitivity in specific frequency bands and causing multiple-reset behavior. To address this, a shaping filter is introduced in the reset-trigger path to regulate the reset action and suppress harmonic-induced effects while preserving the desired crossover-phase recovery. The proposed controllers are implemented in real time on an industrial piezo nanopositioner, demonstrating an experimental open-loop crossover increase of approximately 55~Hz and a closed-loop bandwidth improvement of about 34~Hz relative to a well-tuned linear baseline.

This study introduces a modified version of the constant-in-gain, lead-in-phase (CgLp) filter, which incorporates a feedthrough term in the first-order reset element (FORE) to reduce the undesirable nonlinearities and achieve an almost constant gain across all frequencies. A backward calculation approach is proposed to derive the additional parameter introduced by the feedthrough term, enabling designers to easily tune the filter to generate the required phase. This article also presents an add-on filter structure that can enhance the performance of an existing LTI controller without altering its robustness margins. A sensitivity improvement indicator is proposed to guide the tuning process, enabling designers to visualize the improvements in closed-loop performance. The proposed methodology is demonstrated through a case study of an industrial wire bonder machine, showcasing its effectiveness in addressing low-frequency vibrations and improving overall control performance.

Most systems exhibit significant variability in their dynamics, including variations in system parameters and large high-frequency dynamic uncertainties. Traditional uncertainty modelling techniques consolidate all such variations into a single uncertainty block, often yielding overly conservative representations of the true plant behaviour. This paper introduces an uncertainty modelling framework that employs multiple structured and unstructured uncertainty blocks to reduce this conservatism. The methodology is evaluated for an industrial piezoelectric nanopositioner subject to payload-induced variations, using uncertainty models of differing complexity. A bandpass controller is synthesised via structured mixed-μ synthesis, and the resulting designs are compared in terms of conservatism of the uncertainty model, robust performance, and computational effort.

This paper proposes a novel discrete-time (DT) implementation of the generalized Clegg integrator (GCI), which is an integrator that resets its state to a fraction of the original state when its input is equal to zero. The implementation is derived by discretizing a continuous-time (CT) GCI using the Tustin discretization method. By means of a numerical validation it is shown that the state of the DT GCI is identical to its CT counterpart when both are subject to an input which is linearly interpolated between samples, as expected when using this discretization method. For a general CT input which is not linearly interpolated between samples, a numerical comparison is made between the state of the novel DT GCI and the CT GCI. At samples with linear behaviour, the state mismatch is equivalent to the one observed between their linear counterparts. At samples with resetting behaviour, the mismatch even reduces compared to previous samples, as a consequence of (partially) resetting the state mismatch.

This paper presents an experimental framework for inducing and tuning vibration bandgaps in digitally controlled mechatronic metamaterials. A slender-beam structure instrumented with collocated piezoelectric sensor-actuator pairs distributed periodically along the length is used as the host medium, with decentralized second-order low-pass resonant filter with negative position feedback controllers implemented in real time on an FPGA platform. Unlike conventional approaches that assess bandgap formation through tip displacement, this study relies on bending strain minimization of piezoelectric sensors as the principal indicator of control-induced bandgaps. This reflects more accurately the moment-based phase cancellation dynamics similar to resonator behavior. We derive analytical expressions for transmissibility in an n x n decentralized feedback architecture and verify them experimentally using a 7 x 7 unit-cell configuration. The findings show that resonant controllers with negative feedback applied at the unit-cell level can be systematically tuned through controller gain and damping to open targeted low-frequency bandgaps and significantly improve vibration attenuation. By shifting the focus to localized dynamics, this work deepens the understanding of how control-induced bandgaps emerge and demonstrates a scalable pathway for designing programmable mechatronic metamaterials based on unconventional resonator behavior.

AbstractPiezoelectric nanopositioning systems exhibit low damping and resonance modes that are highly sensitive to loading conditions, resulting in performance degradation under payload variations. Conventional damping and robust control methods typically address these challenges separately, overlooking the coupling between damping and tracking dynamics as well as the influence of higher-order resonant modes. This paper proposes a dual-loop control framework that integrates active damping with mixed-sensitivity H∞ synthesis to achieve robust reference tracking and disturbance rejection under large resonance frequency variations. A Non-Minimum-Phase Resonant Controller (NRC) is implemented in the inner loop to suppress the dominant resonance and reduce system uncertainty. Generalized plant formulation and systematic weighting design guidelines of arbitrary order are developed to explicitly incorporate higher-order modes in the outer loop H∞ synthesis. The proposed approach is validated through simulations and experiments on an industrial piezoelectric nanopositioning system, demonstrating improved robustness and precision across the full payload range.

Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy.

Nanopositioning systems frequently encounter limitations in control bandwidth due to their lightly damped resonance behavior. This paper presents a novel Non-Minimum-Phase Resonant Controller (NRC) aimed at active damping control within dual closed-loop architectures, specifically applied to piezo-actuated nanopositioning systems. The control strategy is structured around formulated objectives for shaping sensitivity functions to meet predetermined system performance criteria. Leveraging non-minimum-phase characteristics, the proposed NRC accomplishes complete damping and the bifurcation of double resonant poles at the primary resonance peak through a constant-gain design accompanied by tunable phase variation. The NRC demonstrates robustness against frequency variations of the resonance arising from load changes and is also capable of damping higher-order flexural modes simultaneously. Furthermore, by establishing high gains at low frequencies within the inner closed-loop and integrating it with a conventional PI tracking controller, the NRC achieves substantial dual closed-loop bandwidths that can exceed the first resonance frequency. Moreover, the NRC significantly diminishes the effect of low-frequency reference signals on real feedback errors while effectively rejecting disturbances proximate to the resonance frequency. All contributions are thoroughly formulated and exemplified mathematically, with the controller’s performance confirmed through an experimental setup utilizing an industrial nanopositioning system. The experimental results indicate dual closed-loop bandwidths of 830 Hz and 755 Hz, characterized by  ± 3 dB and  ± 1 dB bounds, respectively, that surpass the resonance frequency of 710 Hz.

Contactless handling systems for substrates hold significant potential in enhancing chip manufacturing yields by allowing the use of thinner and larger substrates, eliminating the risks associated with physical contact. This article introduces a novel contactless force actuator, employing the active air-bearing working principle, designed with a compact structure to effectively actuate substrates. The actuator features a continuous deformable air-bearing surface composed of compliant-based actuation unit cells, ensuring ease of fabrication to meet tight air-bearing tolerances. A modular design with seven unit cells is designed and manufactured to validate the performance. The results confirm that the proposed contactless actuator can be used to levitate and actuate the substrate simultaneously, in which case the maximum actuation force in the x -axis is determined to be 90 mN and a 42.5- μ m fly height in the z -axis is achieved.

Nanopositioning systems frequently encounter limitations in control bandwidth due to their lightly damped resonance behavior. This paper presents a novel Non-Minimum-Phase Resonant Controller (NRC) aimed at active damping control within dual closed-loop architectures, specifically applied to piezo-actuated nanopositioning systems. The control strategy is structured around formulated objectives for shaping sensitivity functions to meet predetermined system performance criteria. Leveraging non-minimum-phase characteristics, the proposed NRC accomplishes complete damping and the bifurcation of double resonant poles at the primary resonance peak through a constant-gain design accompanied by tunable phase variation. The NRC demonstrates robustness against frequency variations of the resonance arising from load changes and is also capable of damping higher-order flexural modes simultaneously. Furthermore, by establishing high gains at low frequencies within the inner closed-loop and integrating it with a conventional PI tracking controller, the NRC achieves substantial dual closed-loop bandwidths that can exceed the first resonance frequency. Moreover, the NRC significantly diminishes the effect of low-frequency reference signals on real feedback errors while effectively rejecting disturbances proximate to the resonance frequency. All contributions are thoroughly formulated and exemplified mathematically, with the controller's performance confirmed through an experimental setup utilizing an industrial nanopositioning system. The experimental results indicate dual closed-loop bandwidths of 830 Hz and 755 Hz, characterized by $\pm3$ dB and $\pm1$ dB bounds, respectively, that surpass the resonance frequency of 710 Hz.

Lightly damped structural resonances limit the performance of high-precision mechatronic systems and flexible structures. Conventional active damping schemes, such as positive and negative position feedback, provide moderate damping at the targeted mode but often suffer from spillover at low and high frequencies, especially in systems with closely spaced modes or high noise sensitivity. This paper presents a generalized higher-order bandpass active damping framework that enhances modal selectivity and stability for narrowband damping. Analytical formulations establish relationships between controller order, bandpass slope characteristics, and stability margins, enabling systematic design with high phase robustness. A non-minimum-phase filter is incorporated to compensate for delay-induced phase degradation, while a tunable damping coefficient increases design flexibility. Simulation studies on identified collocated and non-collocated systems demonstrate that the proposed controller achieves sharp resonance suppression, improved noise attenuation, and reduced spillover compared with conventional active damping schemes.

Elastic piezoelectric metastructures with actively implemented resonators offer an opportunity for novel vibration attenuation solutions, thanks to the possibility of creating bandgaps at low frequencies, their tuneability and compactness. We focus on metastructures with sensors and actuators, where the resonators are implemented using feedback control techniques, an alternative to commonly used shunt circuits. For bandgap creation in finite structures, unit-cell-based dispersion analysis is unsuitable since it lacks information on modal behaviour. As an alternative, a modal analysis approach can be used to calculate the frequency range of a locally resonant bandgap in closed form using the assumption of an infinite number of transducers of infinitesimal length distributed along the structure. The predictions obtained using this approach are accurate if a sufficiently high number of transducers is used, and the number required increases with the increasing target frequency. Despite the recent developments in the field, it remains to be seen what the sufficient number is in a specific situation. In this paper, we show that for low-frequency bandgaps in cantilevers, the minimal number of transducers is equal to the number of the dominant vibration mode at the targeted range of frequencies. Increasing the number of transducers above this value increases the vibration attenuation in the bandgap region but does not result in its widening. The result is demonstrated using numerical analysis.

We introduce a fractional-order generalization of the hybrid integrator-gain system (HIGS) with memory reset of the fractional-order operator when re-enter the integration mode. We compute the describing function for rational orders in terms of Mittag-Leffler functions. The concepts also allow for the evaluation of the higher-order harmonics. For the implementation we represent higher-order approximations by combining first-order reset elements with an integrator. The fractional-order extension without memory reset can also be approximated using the same framework. Finally we show how the approximation affects the describing function.

To address the limitations imposed by Bode's gain-phase relationship in linear controllers, a reset-based filter called the Constant in gain- Lead in phase (CgLp) filter has been introduced. This filter consists of a reset element and a linear lead filter. However, the sequencing of these two components has been a topic of debate. Positioning the lead filter before the reset element in the loop leads to noise amplification in the reset signal, whereas placing the lead filter after the reset element results in the magnification of higher-order harmonics. This study introduces a tunable lead CgLp structure in which the lead filter is divided into two segments, enabling a balance between noise reduction and higher-order harmonics mitigation. Additionally, a filtering technique is proposed, employing a target-frequency-based approach to mitigate nonlinearity in reset control systems in the presence of noise. The effectiveness of the proposed methods in reducing nonlinearity is demonstrated through both frequency domain and time-domain analyses using a simulated precision positioning system as a case study.

This paper explores the use of reset control in systems subjected to wide-band disturbances. Such excitation may result in too rare or excessive resetting, leading to deteriorated performance. Moreover, the commonly used Describing Function (DF) approximation for the frequency-domain design of reset systems does not sufficiently represent the reset element’s behavior under such conditions as it is defined for sinusoidal excitation. To address this, we present a design approach based on analyzing the power spectral densities (PSD) of the signals in the system and using the Best Linear Approximations (BLA) of reset elements. In the first step, the dominant components in the PSD of the reset triggering signal are related to the frequency domain properties of the reset element. To benefit from resetting, it should lead to an increase in phase margins near the cross-over frequency. This is the case where the components at the cross-over frequency dominate the reset triggering signal. To ensure this, the use of a bandpass shaping filter is proposed. In the second step, the BLA of the reset element is used to represent its response to the signal with a specific PSD in the frequency domain. This information is used to tune both the reset element and the shaping filter to achieve the desired performance and minimize loss of gain at low frequencies. Closed-loop simulations show the method’s feasibility in achieving the desired behavior of the reset element, leading to improved resonance peak damping in the example studied.

In this note, we present an extension of the nonlinear negative imaginary (NI) systems theory to reset systems. We define the reset negative imaginary (RNI) and reset strictly negative imaginary (RSNI) systems and provide a state-space characterization of these systems in terms of linear matrix inequalities. Subsequently, we establish the conditions for the internal stability of a positive feedback interconnection of a (strictly) negative imaginary linear time-invariant plant and a reset (strictly) negative imaginary controller. The applicability of the proposed method is demonstrated in a numerical example of a reset version of a positive position feedback (PPF) controller for a plant with resonance.

Piezoelectric nanopositioning systems, typically guided by flexure mechanisms, are limited to low closed-loop bandwidths due to their lightly damped resonance behavior. Active damping controllers (ADCs) have been widely employed to suppress the dominant first mode and enable higher bandwidths; however, their performance is severely degraded in the presence of delay, while significant higher-order modes often remain unaddressed, further restricting precision. This paper proposes a simple loop-shaping methodology that incorporates a non-minimum-phase (NMP) filter in series with a linear damping controller to restore sufficient phase margins at open-loop crossover frequencies, thereby mitigating delay-induced degradation in closed-loop damping performance. The methodology is further extended to a parallel damping control structure that enables simultaneous suppression of both the first dominant and higher-order modes. Experimental validation on a piezoelectric nanopositioner demonstrates the effectiveness of the proposed strategy, achieving up to 25.5 dB attenuation of higher-order resonances under significant delay. In conjunction with a standard proportional–integral (PI) motion controller and a non-minimum-phase resonant controller (NRC) targeting the first mode, the overall control architecture extends the closed-loop bandwidth to 435 Hz, surpassing the system’s first resonance frequency, without compromising low-frequency dynamics.

Piezoelectric nanopositioning systems exhibit low damping and resonance modes that are highly sensitive to loading conditions, resulting in performance degradation under payload variations. Conventional damping and robust control methods typically address these challenges separately, overlooking the coupling between damping and tracking dynamics as well as the influence of higher-order resonant modes. This paper proposes a dual-loop control framework that integrates active damping with mixed-sensitivity H∞ synthesis to achieve robust reference tracking and disturbance rejection under large resonance frequency variations. A Non-Minimum-Phase Resonant Controller (NRC) is implemented in the inner loop to suppress the dominant resonance and reduce system uncertainty. Generalized plant formulation and systematic weighting design guidelines of arbitrary order are developed to explicitly incorporate higher-order modes in the outer-loop H∞ synthesis. The proposed approach is validated through simulations and experiments on an industrial piezoelectric nanopositioning system, demonstrating improved robustness and precision across the full payload range.

This article introduces an output prediction method for a general class of closed-loop reset control systems. The considered type of system consists of a linear time-invariant (LTI) part which is connected in feedback with a reset controller that (partially) resets (a part of) its states when its input is equal to zero. Given some practical assumptions on the reset element’s input signal, the system output can be accurately predicted when the system is subject to a sinusoidal input. One benefit of this approach is that it provides an intuitive frequency-domain representation of the system. Another benefit is that output prediction can be done based solely on a frequency-response function (FRF) of the LTI part of the system. This article also introduces an accurate and computationally efficient algorithm which can – based on the predicted output – compute a closed-loop pseudo-sensitivity. This pseudo-sensitivity represents the ratio between the maximum absolute value of the system’s output and the amplitude of its input, similar to the closed-loop sensitivity functions for LTI systems.