Bulk micromachined electrostatic RMS-to-DC converter
Journal Article
(2001)
Author(s)
G. de Graaf (TU Delft - Electronic Instrumentation)
Marian Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Z Xiao (TU Delft - Old - EWI Sect. ECTM)
CJ Mullem (External organisation)
R.F. Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:1ebf878c-8c6b-4040-aa1f-15cae063e76e
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Publication Year
2001
Research Group
Electronic Instrumentation
Issue number
6
Volume number
50
Pages (from-to)
1508-1512
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