7 records found
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Bulk micromachined electrostatic RMS-to-DC converter
Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication
Study of SOI technology for RMS converter application
Optimized design of RMS converter with electro-static force based on ANSYS simulation
Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching
Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process
Design of membrane structures for RMS converter application