Library
search
local_library
Repository
Z
Z Xiao
View Pure Profile
Authored
7 records found
Optimized design of RMS converter with electro-static force based on ANSYS simulation
Report -
Z Xiao
Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process
Journal article -
Z Xiao
,
Min Chen
,
Guoying Wu
,
Changde Zhao
,
Dacheng Zhang
,
Yilong Hao
,
Guobing Zhang
,
ZH Li
Bulk micromachined electrostatic RMS-to-DC converter
Journal article -
G. de Graaf
,
M. Bartek
,
Z Xiao
,
CJ Mullem
,
R.F. Wolffenbuttel
Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication
Conference paper -
M. Bartek
,
Z Xiao
,
CJ van Mullem
,
R.F. Wolffenbuttel
Design of membrane structures for RMS converter application
Report -
Z Xiao
Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching
Conference paper -
Z Xiao
,
Guoying Wu
,
Min Chen
,
Changde Zhao
,
Dacheng Zhang
,
Yilong Hao
,
ZH Li
Study of SOI technology for RMS converter application
Report -
Z Xiao