7 records found
1
Bulk micromachined electrostatic RMS-to-DC converter
Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication
Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process
Design of membrane structures for RMS converter application
Study of SOI technology for RMS converter application
Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching
Optimized design of RMS converter with electro-static force based on ANSYS simulation