Bulk micromachined electrostatic RMS-to-DC converter

Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Optimized design of RMS converter with electro-static force based on ANSYS simulation

Design of membrane structures for RMS converter application

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Study of SOI technology for RMS converter application