Bulk micromachined electrostatic RMS-to-DC converter

Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Design of membrane structures for RMS converter application

Study of SOI technology for RMS converter application

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Optimized design of RMS converter with electro-static force based on ANSYS simulation