Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication
Conference Paper
(2000)
Author(s)
M. Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Z Xiao (TU Delft - Old - EWI Sect. ECTM)
CJ van Mullem (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:a5e96a45-aeb9-48ae-8aa1-61bd040f4fe0
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Publication Year
2000
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
1-4
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