Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999)

Authors

Z Xiao Old - EWI Sect. ECTM
Guoying Wu External organisation
Min Chen External organisation
Changde Zhao External organisation
Dacheng Zhang External organisation
Yilong Hao External organisation
ZH Li External organisation
Research Group
Old - EWI Sect. ECTM
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM