Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference Paper (1999)
Author(s)

Z Xiao (TU Delft - Old - EWI Sect. ECTM)

Guoying Wu (External organisation)

Min Chen (External organisation)

Changde Zhao (External organisation)

Dacheng Zhang (External organisation)

Yilong Hao (External organisation)

ZH Li (External organisation)

Research Group
Old - EWI Sect. ECTM
More Info
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Publication Year
1999
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1518-1521

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