Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching
Conference Paper
(1999)
Author(s)
Z Xiao (TU Delft - Old - EWI Sect. ECTM)
Guoying Wu (External organisation)
Min Chen (External organisation)
Changde Zhao (External organisation)
Dacheng Zhang (External organisation)
Yilong Hao (External organisation)
ZH Li (External organisation)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:1de53353-c3ae-4aa9-ad89-1ce2e03ea7ce
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Publication Year
1999
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1518-1521
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