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DZ
Dacheng Zhang
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2 records found
Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process
Journal article -
Z Xiao
,
Min Chen
,
Guoying Wu
,
Changde Zhao
,
Dacheng Zhang
,
Yilong Hao
,
Guobing Zhang
,
ZH Li
Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching
Conference paper -
Z Xiao
,
Guoying Wu
,
Min Chen
,
Changde Zhao
,
Dacheng Zhang
,
Yilong Hao
,
ZH Li