Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process
Journal Article
(1999)
Author(s)
Z Xiao (TU Delft - Old - EWI Sect. ECTM)
Min Chen (External organisation)
Guoying Wu (External organisation)
Changde Zhao (External organisation)
Dacheng Zhang (External organisation)
Yilong Hao (External organisation)
Guobing Zhang (External organisation)
ZH Li (External organisation)
Research Group
Old - EWI Sect. ECTM
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Publication Year
1999
Research Group
Old - EWI Sect. ECTM
Volume number
77
Pages (from-to)
113-119
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