Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

Boellaard, E; Pham, PN; Sarro, P.M.; Burghartz, JN

Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

Conference paper (2002)

Authors

E Boellaard Electronic Components, Technology and Materials

PN Pham Electronic Components, Technology and Materials

P.M. Sarro Electronic Components, Technology and Materials

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:1ece9d48-8a0b-404e-b1b0-bd7abda8de5a

More Info

expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials

No files available

Metadata only record. There are no files for this conference paper.