Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

Conference paper (2002)

Authors

E Boellaard Electronic Components, Technology and Materials - EEMCS
PN Pham Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials