Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison
Conference Paper
(2002)
Author(s)
E Boellaard (TU Delft - Electronic Components, Technology and Materials)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:1ece9d48-8a0b-404e-b1b0-bd7abda8de5a
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
81-86
ISBN (print)
90-73461-33-2
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