Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers
Conference Paper
(2018)
Author(s)
M. Amir Ghaderi (TU Delft - Electronic Instrumentation)
E. Karimi (External organisation)
RF Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1364/NOMA.2018.NoW1D.3
To reference this document use:
https://resolver.tudelft.nl/uuid:1fcee7ba-c853-484a-b35d-36a7dfb831cd
More Info
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Publication Year
2018
Language
English
Research Group
Electronic Instrumentation
Volume number
Part F107-NOMA 2018
Pages (from-to)
1-2
ISBN (electronic)
978-1-943580-43-9
Abstract
Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.
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