Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

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Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

Conference Paper (2018)

Author(s)

M. Ghaderi (TU Delft - Electrical Engineering, Mathematics and Computer Science)

E. Karimi (External organisation)

R.F. Wolffenbuttel (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronic Instrumentation

Metamaterials Optical microelectromechanical devices

DOI related publication

https://doi.org/10.1364/NOMA.2018.NoW1D.3 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:1fcee7ba-c853-484a-b35d-36a7dfb831cd

More Info

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Publication Year

2018

Language

English

Research Group

Electronic Instrumentation

Volume number

Part F107-NOMA 2018

Article number

NoW1D.3

Pages (from-to)

1-2

ISBN (electronic)

978-1-943580-43-9

Event

Novel Optical Materials and Applications, NOMA 2018 (2018-07-02 - 2018-07-05), Zurich, Switzerland

Downloads counter

164

Abstract

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.