Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

Conference Paper (2018)
Author(s)

M. Amir Ghaderi (TU Delft - Electronic Instrumentation)

E. Karimi (External organisation)

RF Wolfenbuttel (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1364/NOMA.2018.NoW1D.3
More Info
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Publication Year
2018
Language
English
Research Group
Electronic Instrumentation
Volume number
Part F107-NOMA 2018
Pages (from-to)
1-2
ISBN (electronic)
978-1-943580-43-9

Abstract

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

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