Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers
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Abstract
Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.
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NOMA_2018_NoW1D.3.pdf
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