Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Conference Paper (2011)

Author(s)

AT Tran (TU Delft - Electrical Engineering, Mathematics and Computer Science)

G Pandraud (TU Delft - Electrical Engineering, Mathematics and Computer Science)

H Schellevis (TU Delft - Electrical Engineering, Mathematics and Computer Science)

T Alan (TU Delft - Electrical Engineering, Mathematics and Computer Science)

V Aravindh (External organisation)

O Wunnicke (External organisation)

PM Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronic Components, Technology and Materials

Conf.proc. > 3 pag Conference contrib. refereed

DOI related publication

https://doi.org/10.1016/j.proeng.2011.12.166 Final published version

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Publication Year

2011

Language

English

Research Group

Electronic Components, Technology and Materials

Pages (from-to)

673-676

Publisher

Elsevier

Event

Eurosensors XXV (2011-09-04 - 2011-09-07), Athens, Greece

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