Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Tran, AT; Pandraud, G.; Schellevis, H; Alan, T; Aravindh, V; Wunnicke, O; Sarro, Pasqualina M.

Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Conference paper (2011)

Authors

AT Tran Electronic Components, Technology and Materials

G. Pandraud Electronic Components, Technology and Materials

H Schellevis Electronic Components, Technology and Materials

T Alan Electronic Components, Technology and Materials

V Aravindh External organisation

O Wunnicke External organisation

Pasqualina M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2011

Language

English

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Research Group

Electronic Components, Technology and Materials

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