Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations
Conference Paper
(2011)
Author(s)
AT Tran (TU Delft - Electronic Components, Technology and Materials)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
T Alan (TU Delft - Electronic Components, Technology and Materials)
V Aravindh (External organisation)
O Wunnicke (External organisation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2011.12.166
To reference this document use:
https://resolver.tudelft.nl/uuid:20a925d1-3aed-45ca-aada-7710899e0839
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
673-676
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