Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Conference paper (2011)

Authors

A.T. Tran Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

T Alan Electronic Components, Technology and Materials -

V Aravindh External organisation

O Wunnicke External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:20a925d1-3aed-45ca-aada-7710899e0839

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials