A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

Conference Paper (2011)

Author(s)

Bruno Morana (TU Delft - Electronic Components, Technology and Materials)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

L Mele (TU Delft - Electronic Components, Technology and Materials)

M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)

Grégory Pandraud (TU Delft - Electronic Components, Technology and Materials)

J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)

PM Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group

Electronic Components, Technology and Materials

DOI related publication

https://doi.org/10.1109/MEMSYS.2011.5734441

Conf.proc. > 3 pag Conference contrib. refereed

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Publication Year

2011

Language

English

Research Group

Electronic Components, Technology and Materials

Pages (from-to)

380-383

ISBN (print)

978-1-4244-9634-1

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