A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

Conference Paper (2011)
Author(s)

Bruno Morana (TU Delft - Electronic Components, Technology and Materials)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

L. Mele (TU Delft - Electronic Components, Technology and Materials)

M Mihailovic (TU Delft - Electronic Components, Technology and Materials)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)

Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/MEMSYS.2011.5734441
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
380-383
ISBN (print)
978-1-4244-9634-1

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