A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

Conference paper (2011)

Authors

B. Morana Electronic Components, Technology and Materials -

F. Santagata Electronic Components, Technology and Materials -

L. Mele Electronic Components, Technology and Materials -

M. Mihailovic Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

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http://resolver.tudelft.nl/uuid:20b3498f-dd4b-43fd-86ae-7029ccd7896c

Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials