L. Mele

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Conference paper (2)

2 records found

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference paper (2011) - L Mele, T Rossi, M Riccio, E Iervolino, F Santagata, A Irace, G Breglio, JF Creemer, PM Sarro

Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition

Conference paper (2009) - L Mele, B Morana, CR de Boer, JF Creemer, PM Sarro