L. Mele

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Conference paper (2)

2 records found

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference paper (2011) - L Mele , T Rossi , M Riccio , E Iervolino , F Santagata , A Irace , G Breglio , JF Creemer , PM Sarro

Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition

Conference paper (2009) - L Mele , B Morana , CR de Boer , JF Creemer , PM Sarro