MEMS silicon-based micro-evaporator
Journal Article
(2011)
Author(s)
M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)
CM Rops (External organisation)
J Hao (External organisation)
L. Mele (TU Delft - Electronic Components, Technology and Materials)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1088/0960-1317/21/7/075007
To reference this document use:
https://resolver.tudelft.nl/uuid:ccc54553-da1f-451b-9146-9f0e00264fa3
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
7
Volume number
21
Pages (from-to)
1-9
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