A molybdenum MEMS microhotplate for high-temperature operation

L. Mele (TU Delft - Electronic Components, Technology and Materials)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

E Iervolino (External organisation)

M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)

T Rossi (External organisation)

AT Tran (TU Delft - Electronic Components, Technology and Materials)

H. Schellevis (TU Delft - Electronic Components, Technology and Materials)

JF Creemer (TU Delft - Electronic Components, Technology and Materials)

P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)