A molybdenum MEMS microhotplate for high-temperature operation

L Mele (TU Delft - Electronic Components, Technology and Materials)

F Santagata (TU Delft - Electronic Components, Technology and Materials)

E Iervolino (External organisation)

M Mihailovic (TU Delft - Electronic Components, Technology and Materials)

T Rossi (External organisation)

A.T. Tran (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)

Lina Sarro (TU Delft - Electronic Components, Technology and Materials)