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A molybdenum MEMS microhotplate for high-temperature operation
Journal article (2012) -
L. Mele (author)
,
F. Santagata (author)
,
E Iervolino (author)
,
M Mihailovic (author)
,
T Rossi (author)
,
AT Tran (author)
,
H. Schellevis (author)
,
JF Creemer (author)
,
P.M. Sarro (author)