An analytical model and verification for MEMS Pirani gauges

Journal article (2011)

Authors

F. Santagata Electronic Components, Technology and Materials - EEMCS
E. Iervolino Old - EWI Sect. ECTM
L. Mele Electronic Components, Technology and Materials - EEMCS
AW van Herwaarden External organisation
J.F. Creemer Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials