An analytical model and verification for MEMS Pirani gauges
Journal Article
(2011)
Author(s)
F Santagata (TU Delft - Electronic Components, Technology and Materials)
E. Iervolino (TU Delft - Old - EWI Sect. ECTM)
L. Mele (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:e539e9ad-aec8-495c-82bd-3174c4e5beda
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
21
Pages (from-to)
1-7
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