22 records found
1
A novel silicon interposer for measuring devices requiring complex two-sided contacting
Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum
MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses
Temperature dependence of the resonance frequency of thermogravimetric devices
Thermogravimetric device with integrated thermal actuators
Microhotplates with TiN heaters
Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly
Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer
Design and fabrication of an infrared microspectrometer using attenuated total reflection
MEMS Hotplates with TiN as a Heater Material
Fabrication of nanofluidic devices using glass-to-glass anodic bonding
Wafer thinning for high-density, through-wafer interconnects
Fabrication of nanochannels using glass to glass anodic bonding
Thinning of micromachined wafers for high-density, through-wafer interconnects
The fabrication of a focal plane infrared silicon detection
Design and fabrication of infrared detector arrays for satellite attitude control
Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions
Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
Design of infrared detector arrays for satellite attitude control
