21 records found
1
A novel silicon interposer for measuring devices requiring complex two-sided contacting
MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses
Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum
Temperature dependence of the resonance frequency of thermogravimetric devices
Thermogravimetric device with integrated thermal actuators
Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly
Microhotplates with TiN heaters
Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer
Design and fabrication of an infrared microspectrometer using attenuated total reflection
MEMS Hotplates with TiN as a Heater Material
Fabrication of nanofluidic devices using glass-to-glass anodic bonding
Wafer thinning for high-density, through-wafer interconnects
Fabrication of nanochannels using glass to glass anodic bonding
Thinning of micromachined wafers for high-density, through-wafer interconnects
The fabrication of a focal plane infrared silicon detection
Design and fabrication of infrared detector arrays for satellite attitude control
Fabrication of a focal plane array infrared detector for a satellite attitude control system
Design of infrared detector arrays for satellite attitude control
Practical considerations of the galvanic etch-stop for device applications
Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
