Sputtered molybdenum as conductive material for high-temperature microhotplates

L. Mele (TU Delft - Electronic Components, Technology and Materials)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

E Iervolino (TU Delft - Old - EWI Sect. ECTM)

M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)

T Rossi (External organisation)

A.T. Tran (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)

PM Sarro (TU Delft - Electronic Components, Technology and Materials)