Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers
Conference Paper
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
J van der Heijden (External organisation)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
H.S.J. Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:21aa3d81-73ec-402a-a81d-de98018ddfab
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Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Pages (from-to)
380-384
ISBN (print)
978-1-4244-4629-2
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