Advanded dry etching for next generation thin film heads for mangentic recording.
Report
(2001)
Author(s)
MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
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Publication Year
2001
Research Group
QN/Kavli Nanolab Delft
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