Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing
Journal Article
(2010)
Author(s)
S. Dobrovolskiy (External organisation)
AE Yakshin (External organisation)
F. D. Tichelaar (QN/High Resolution Electron Microscopy)
J Verhoeven (External organisation)
E Louis (External organisation)
F. Bijkerk (External organisation)
DOI related publication
https://doi.org/10.1016/j.nimb.2009.12.022
To reference this document use:
https://resolver.tudelft.nl/uuid:260df5bb-1e71-47c8-a19e-f6c0f0c1e5cb
More Info
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Publication Year
2010
Language
English
Issue number
6
Volume number
268
Pages (from-to)
560-567
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