Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Dobrovolskiy, S.; Yakshin, AE; Tichelaar, F.; Verhoeven, J; Louis, E; Bijkerk, F

Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Journal article (2010)

Authors

S. Dobrovolskiy External organisation

AE Yakshin External organisation

F. Tichelaar

J Verhoeven External organisation

E Louis External organisation

F Bijkerk External organisation

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Published Date

2010

Language

English

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