Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Journal article (2010)

Authors

S Dobrovolskiy External organisation
AE Yakshin External organisation
F.D. Tichelaar QN/High Resolution Electron Microscopy
J Verhoeven External organisation
E Louis External organisation
F Bijkerk External organisation
Research Group
QN/High Resolution Electron Microscopy
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Published Date

2010

Language

English

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Research Group

QN/High Resolution Electron Microscopy