Very thin SiC membranes for micromachined vacuum sensors
Conference Paper
(2008)
Author(s)
HTM Pham (TU Delft - Old - EWI Sect. ECTM)
C Fan (External organisation)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
NM van der Pers (External organisation)
P. Visser (TU Delft - OLD Virtual Materials and Mechanics)
C. Kwakernaak (TU Delft - OLD Surface and Interface Engineering)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:26357c81-9330-4a6c-b43e-5f2c2a3ad617
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Bibliographical Note
NEO (bij TNW is het in 2008 wel opgevoerd)@en
Pages (from-to)
1143-1146
ISBN (print)
978-1-4244-2581-5
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