Very thin SiC membranes for micromachined vacuum sensors

Conference paper (2008)

Authors

HTM Pham Old - EWI Sect. ECTM
C Fan External organisation
G. Pandraud Electronic Components, Technology and Materials - EEMCS
J.F. Creemer Electronic Components, Technology and Materials - EEMCS
NM van der Pers External organisation
P Visser OLD Virtual Materials and Mechanics
C. Kwakernaak OLD Surface and Interface Engineering
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM