Material-Inversion Solid-Phase Epitaxy of p+ Si for Elevated Junctions
Conference Paper
(2006)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:26ee2f23-abc2-4141-ac22-94f0412a5ef5
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
97-103
ISBN (print)
1-56677-502-7
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