Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns
Journal Article
(1996)
Author(s)
XR Jiang (TU Delft - ImPhys/Charged Particle Optics)
JE Barth (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:288944db-7686-475e-934d-a19b4e5fcf1a
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Publication Year
1996
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
B14
Pages (from-to)
3747-3752
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