Impact of fabrication technology on flexural resonances of silicon nitride cantilevers
Conference Paper
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
HJR Westra (TU Delft - QN/Mol. Electronics & Devices)
EWJM van der Drift (TU Delft - Applied Sciences)
WJ Venstra (TU Delft - QN/Mol. Electronics & Devices)
HSJ van der Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
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Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Pages (from-to)
1216-1218
Publisher
Elsevier
ISBN (print)
0167-9317
Event
34th Conference on Micro and nano Engineering (2008-09-15 - 2008-09-18), Europa
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