Impact of fabrication technology on flexural resonances of silicon nitride cantilevers
Conference Paper
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
HJR Westra (TU Delft - QN/Mol. Electronics & Devices)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
W.J. Venstra (TU Delft - QN/Mol. Electronics & Devices)
Herre S J Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:29d9e2f4-72e4-42af-b7ba-366eb7ef385d
More Info
expand_more
expand_more
Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Pages (from-to)
1216-1218
ISBN (print)
0167-9317
No files available
Metadata only record. There are no files for this record.