All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing

Conference paper (2011)

Authors

A. Purniawan Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
Y. Huang Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation