All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing
Conference Paper
(2011)
Author(s)
A. Purniawan (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Grégory Pandraud (TU Delft - Electronic Components, Technology and Materials)
Y Huang (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ICSENS.2011.6127051
To reference this document use:
https://resolver.tudelft.nl/uuid:29f63493-4c4e-4f7b-8f2d-4ea953907056
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1954-1957
ISBN (print)
978-1-4244-9290-9
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