Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

The atomic layer deposition array defined by etch-back technique: a new method to fabricate TiO2 nanopillars, nanotubes and nanochannel arrays

Reflectance-based two-dimensional TiO 2 photonic crystal liquid sensors

Optofluidics: Waveguides and devices

Hybrid silicon-PDMS optofluidic ARROW waveguide

Reflectance-based photonic crystal liquid sensors made of ALD TiO2

PECVD SiC photonic crystal sensor

All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing

Reflectance-based TiO2 photonic crystal sensors

Design and optimization of TiO2 photonic crystal structures for sensing applications working with visible/NIR light

Liquid core ARROW waveguides by atomic layer deposition

Integrated silicon optofluidic ring resonator

High visibility optofluidic Mach-Zehnder interferometer

An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors

Al2O3 nanolayer as evanescent waveguide for biomedical sensor application

Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications

Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application