The atomic layer deposition array defined by etch-back technique: a new method to fabricate TiO2 nanopillars, nanotubes and nanochannel arrays
Journal Article
(2012)
Author(s)
Y. Huang (TU Delft - Electronic Components, Technology and Materials)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1088/0957-4484/23/48/485306
To reference this document use:
https://resolver.tudelft.nl/uuid:cf958299-402b-4046-9704-9df033258afd
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
23
Pages (from-to)
1-8
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