An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors
Conference Paper
(2010)
Author(s)
Y. Huang (TU Delft - Electronic Components, Technology and Materials)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2010.09.314
To reference this document use:
https://resolver.tudelft.nl/uuid:65571383-f24c-4e6b-bd07-623dd063661b
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1148-1151
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