Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications
Conference Paper
(2009)
Author(s)
Y Huang (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:da819352-812a-4479-9684-ae68e91ed687
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
24-27
ISBN (print)
978-90-73461-62-8
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