PECVD SiC photonic crystal sensor

Conference Paper (2011)
Author(s)

Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)

Y Huang (TU Delft - Electronic Components, Technology and Materials)

Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)

F Bernal Arango (External organisation)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2011.6127130
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
367-370
ISBN (print)
978-1-4244-9288-6

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