Anisotropic film growth during sputterdeposition of chromium

Grachev, SY; Kamminga, J-D; Alkemade, Paul F.A.; Janssen, GCAM

Anisotropic film growth during sputterdeposition of chromium

Poster (2003)

Authors

SY Grachev OLD Virtual Materials and Mechanics

J-D Kamminga OLD Virtual Materials and Mechanics

Paul F.A. Alkemade Old - sect Electronic Materials (NS/EM)

GCAM Janssen OLD Virtual Materials and Mechanics

Research Group

OLD Virtual Materials and Mechanics

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Published Date

2003

Language

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Research Group

OLD Virtual Materials and Mechanics

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