PA

P.F.A. Alkemade

158 records found

The use of citation indicators to gauge impact in science has increased significantly in the last decades. Yet, in the normal sense of the word, the impact of a scientific paper is still largely elusive. This work presents the results of full textual analysis of all citations of ...

3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography

Visualization, Modeling, and Applications in Nanofabrication

In this paper, 3D volumetric energy deposition and local crosslinking of hydrogen silsesquioxane (HSQ) are experimentally and numerically explored in focused helium ion beam lithography (HIBL). In particular, a through-membrane exposure method is developed to make visible and sub ...
We report on advanced defect classification using TNO's RapidNano particle scanner. RapidNano was originally designed for defect detection on blank substrates. In detection-mode, the RapidNano signal from nine azimuth angles is added for sensitivity. In review-mode signals from i ...
Spin-triplet Cooper pairs induced in ferromagnets form the centrepiece of the emerging field of superconducting spintronics. Usually the focus is on the spin-polarization of the triplets, potentially enabling low-dissipation magnetization switching. However, the magnetic texture ...
A combined X-ray and scanning tunneling microscopy (STM) instrument is presented that enables the local detection of X-ray absorption on surfaces in a gas environment. To suppress the collection of ion currents generated in the gas phase, coaxially shielded STM tips were used. Th ...
Particle defects are important contributors to yield loss in semi-conductor manufacturing. Particles need to be detected and characterized in order to determine and eliminate their root cause. We have conceived a process flow for advanced defect classification (ADC) that distingu ...
We report the etching of and electronic transport in nanoribbons of graphene sandwiched between atomically flat hexagonal boron nitride (h-BN). The etching of ribbons of varying width was achieved with a focused beam of 30 keV He+ ions. Using in-situ electrical measure ...
To qualify tools of semiconductor manufacturing, particles unintentionally deposited in these tools are character-ized using blank wafers. With fast optical inspection tools one can quickly localize these particle defects. An ex-ample is TNO's Rapid Nano, which operates in optica ...
Helium ion beam lithography (HIL) has been demonstrated as a promising alternative to electron beam lithography (EBL) for R&D purposes, offering high-resolution lithography at high pattern densities. This chapter reviews focused He ion beam lithography, providing a detailed d ...
The sub-nanometer beam of a helium ion microscope was used to study and optimize helium-ion beam induced deposition of PtC nanopillars with the (CH3)3Pt(CPCH3) precursor. The beam current, beam dwell time, precursor refresh time, and beam focus have been independently varied. Con ...
We have experimentally studied the polarization-dependent transmission properties of a nanoslit in a gold film as a function of its width. The slit exhibits strong birefringence and dichroism. We find, surprisingly, that the transmission of the polarization parallel to the slit o ...