Local stress analysis on semiconductor devices by combined experimental-numerical procedure

Journal article (2011)

Authors

R Kregting External organisation
Sander Gielen External organisation
W van Driel External organisation
P.F.A. Alkemade QN/High Resolution Electron Microscopy , QN/Fysics of NanoElectronics , QN/Kavli Nanolab Delft - AS
H. Miro QN/Kavli Nanolab Delft - AS
J.D. Kamminga OLD Surface and Interface Engineering
Research Group
QN/High Resolution Electron Microscopy
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Published Date

2011

Language

English

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Research Group

QN/High Resolution Electron Microscopy