Local stress analysis on semiconductor devices by combined experimental-numerical procedure
Journal Article
(2011)
Author(s)
R Kregting (External organisation)
Sander Gielen (External organisation)
W van Driel (External organisation)
P. F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QN/Fysics of NanoElectronics, TU Delft - QN/High Resolution Electron Microscopy)
H Miro (TU Delft - QN/Kavli Nanolab Delft)
JD Kamminga (TU Delft - OLD Surface and Interface Engineering)
Research Group
QN/High Resolution Electron Microscopy
To reference this document use:
https://resolver.tudelft.nl/uuid:b09aaa00-28de-48c4-a336-d0e30286a5d9
More Info
expand_more
expand_more
Publication Year
2011
Language
English
Research Group
QN/High Resolution Electron Microscopy
Issue number
6
Volume number
51
Pages (from-to)
1092-1096
No files available
Metadata only record. There are no files for this record.