Local stress analysis on semiconductor devices by combined experimental-numerical procedure
Journal Article
(2011)
Authors
R. Kregting (External organisation)
S Gielen (External organisation)
W van Driel (External organisation)
P.F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft, QN/Fysics of NanoElectronics, QN/High Resolution Electron Microscopy)
H Miro (TU Delft - QN/Kavli Nanolab Delft)
JD Kamminga (OLD Surface and Interface Engineering)
Research Group
QN/High Resolution Electron Microscopy
To reference this document use:
https://resolver.tudelft.nl/b09aaa00-28de-48c4-a336-d0e30286a5d9
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Publication Year
2011
Language
English
Research Group
QN/High Resolution Electron Microscopy
Issue number
6
Volume number
51
Pages (from-to)
1092-1096
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