Helium-ion-beam-induced growth of 3-dimensional AFM probes

Abstract (2016)
Author(s)

G. Nanda (TU Delft - QN/Kavli Nanolab Delft, Kavli institute of nanoscience Delft)

E. van Veldhoven (TNO)

D. Maas (TNO)

R. Herfst (TNO)

Hamed Sadeghian Marnani (TNO, TU Delft - Computational Design and Mechanics)

P.F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft, Kavli institute of nanoscience Delft)

More Info
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Publication Year
2016
Language
English
Pages (from-to)
105-106
Event
13th International Workshop on Nanomechanical Sensing (2016-06-22 - 2016-06-24), Delft, Netherlands
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