Helium-ion-beam-induced growth of 3-dimensional AFM probes
G. Nanda (TU Delft - Applied Sciences, Kavli institute of nanoscience Delft)
E. van Veldhoven (TNO)
D. Maas (TNO)
R. Herfst (TNO)
Hamed Sadeghian Marnani (TNO, TU Delft - Mechanical Engineering)
P.F.A. Alkemade (TU Delft - Applied Sciences, Kavli institute of nanoscience Delft)
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