Helium-ion-beam-induced growth of 3-dimensional AFM probes

Abstract (2016)

Authors

G. Nanda QN/Kavli Nanolab Delft - AS , Kavli institute of nanoscience Delft
D Maas TNO
R. Herfst TNO
H. Sadeghian Marnani TNO, Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
P.F.A. Alkemade QN/Kavli Nanolab Delft - AS , Kavli institute of nanoscience Delft
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
Copyright: © 2016 G. Nanda, E. van Veldhoven, D. Maas, R. Herfst, H. Sadeghian Marnani, P.F.A. Alkemade
Metrology 3D-AFM Ion beam induced deposition Helium ion microscope
More Info
expand_more

Published Date

2016

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft

Files

Nanda.pdf
(.pdf | 0.306 Mb)