Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft
Journal Article
(2012)
Author(s)
PFA Alkemade (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QN/Fysics of NanoElectronics, QN/High Resolution Electron Microscopy)
EM Koster (External organisation)
E van Veldhoven (External organisation)
D.J. Maas (External organisation)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:c9f64127-9633-4a7e-b744-244bea23501f
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Publication Year
2012
Language
English
Research Group
QN/Fysics of NanoElectronics
Issue number
2
Volume number
34
Pages (from-to)
90-100
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