Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

Journal article (2012)

Authors

P.F.A. Alkemade QN/Kavli Nanolab Delft - AS , QN/Fysics of NanoElectronics , QN/High Resolution Electron Microscopy
EM Koster External organisation
E van Veldhoven External organisation
D.J. Maas External organisation
Research Group
QN/Fysics of NanoElectronics
More Info
expand_more

Published Date

2012

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Fysics of NanoElectronics