Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

Journal article (2012)

Authors

P.F.A. Alkemade QN/Fysics of NanoElectronics , QN/Kavli Nanolab Delft - AS , QN/High Resolution Electron Microscopy
EM Koster External organisation
E van Veldhoven External organisation
D.J. Maas External organisation
Research Group
QN/Fysics of NanoElectronics
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Published Date

2012

Language

English

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Research Group

QN/Fysics of NanoElectronics