Nano-engineering with a focused helium ion beam

Conference paper (2012)

Authors

D.J. Maas External organisation
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
E van Veldhoven External organisation
JH Meessen External organisation
M. Rudneva QN/High Resolution Electron Microscopy
P.F.A. Alkemade QN/Fysics of NanoElectronics , QN/High Resolution Electron Microscopy , QN/Kavli Nanolab Delft - AS
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft