Nano-engineering with a focused helium ion beam
Conference Paper
(2012)
Author(s)
D.J. Maas (External organisation)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
E van Veldhoven (External organisation)
JH Meessen (External organisation)
M. Rudneva (QN/High Resolution Electron Microscopy)
PFA Alkemade (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QN/Fysics of NanoElectronics, QN/High Resolution Electron Microscopy)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:f3a2a731-bafe-41cb-b81c-df3ab2446c11
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Publication Year
2012
Language
English
Research Group
QN/Kavli Nanolab Delft
Pages (from-to)
1-14
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