Deposition, milling, and etching with a focused helium ion beam
Book Chapter
(2011)
Author(s)
PFA Alkemade (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QN/Fysics of NanoElectronics, QN/High Resolution Electron Microscopy)
E van Veldhoven (External organisation)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:ad1662f3-7d7c-4029-9cce-297b450fa017
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Publication Year
2011
Language
English
Research Group
QN/Fysics of NanoElectronics
Pages (from-to)
275-300
Publisher
Springer
ISBN (print)
978-3-7091-0423-1
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