Deposition, milling, and etching with a focused helium ion beam

Book chapter (2011)

Authors

P.F.A. Alkemade QN/Fysics of NanoElectronics , QN/High Resolution Electron Microscopy , QN/Kavli Nanolab Delft - AS
E van Veldhoven External organisation
Research Group
QN/Fysics of NanoElectronics
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Published Date

2011

Language

English

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Research Group

QN/Fysics of NanoElectronics