Development of dry etch technology for intelligent micromachined devices
Report
(2004)
Author(s)
G Craciun (TU Delft - Electronic Instrumentation)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
P.J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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Publication Year
2004
Research Group
Electronic Instrumentation
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