The Schottky emitter as a source for multi-electron-beam instruments
X. Guo (TU Delft - Applied Sciences)
P. Kruit – Promotor (TU Delft - Applied Sciences)
J.P. Hoogenboom – Promotor (TU Delft - Applied Sciences)
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Abstract
In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.