XG
X. Guo
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In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.
In the Multi beam source (MBS) of our Multi Beam Scanning Electron Microscope (MBSEM), an aperture lens array (ALA) splits the emission cone of the Schottky field emitter into multiple beamlets. When the apertures in the ALA are close to each other, the ALA can introduce aberrati
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