XG

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In the Multi beam source (MBS) of our Multi Beam Scanning Electron Microscope (MBSEM), an aperture lens array (ALA) splits the emission cone of the Schottky field emitter into multiple beamlets. When the apertures in the ALA are close to each other, the ALA can introduce aberrati ...

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The Wien filter is an important part in the multi-beam inspection microscope that is being developed at the Imaging Physics research group at the TU Delft. The multi-beam inspection microscope uses an array of 20x20 parallel beams with a pitch of 1mmthat scan the sample simultane ...