Preparation of large, location-controlled Si grains by excimer-laser crystallization of a-Si films sputtered at 100C

Conference Paper (2007)
Author(s)

M He (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

CIM Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4

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